Istituto dei materiali per l'elettronica ed il magnetismo     
Sorianello V., Colace L., Assanto G., Notargiacomo A., Armani N., Rossi F., Ferrari C. Thermal evaporation of Ge on Si for near infrared detectors: Material and device characterization. In: Microelectronic Engineering, vol. 88 (4) pp. 526 - 529. EMRS 2010 Spring Meeting on Post-Si-CMOS Electronic Devices - The Role of Ge and III-V Materials, JUN 07-11, 2010 Strasbourg, FRANCE. Alessandro Molle, Guy Brammertz, Athanasios Dimoulas, Chiara Marchiori (eds.). Elsevier B.V, 2011.
Using a low-temperature process, we thermally evaporated Ge thin films on Si substrates and investigated both structural and electrical properties of samples grown at various temperatures. The characterization included X-ray diffraction, atomic force microscopy and Hall measurements and aimed at determining a suitable temperature range in terms of crystal quality and transport properties. Finally, we employed Ge films on Si to fabricate near infrared photodiodes and test them in terms of dark current and responsivity.
URL: http://www.sciencedirect.com/science/article/pii/S016793171000362X
DOI: 10.1016/j.mee.2010.09.024
Subject Germanium

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