PUMA
Istituto dei materiali per l'elettronica ed il magnetismo     
Feré M., Lanata M., Piccinin D., Pietralunga S. M., Zappettini A., Ossi P. M., Martinelli M. Sputtered Ge-Si heteroepitaxial thin films for photodetection in third window. In: Proceedings of the Ieee, pp. 270 - 272. Institute of Electral and Electronics Engineers, Inc, 2008.
 
 
Abstract
(English)
DC-pulsed magnetron sputtering (PMS) allows to produce heteroepitaxial p-type Germanium thin films on 6
DOI: 10.1109/GROUP4.2008.4638169
Subject DC-Pulsed Magnetron Sputtering (PMS)


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