PUMA
Istituto dei materiali per l'elettronica ed il magnetismo     
Attolini G., Musayeva N. MOVPE-1 Reactor. Rapporto interno n. 116. Technical report, 2007.
 
 
Abstract
(English)
This manual was written to help the utilization of the Metal-Organic Vapor Phase Epitaxy (MOVPE) apparatus named MOVPE-1 for growing III-V compounds. An introduction to the MOVPE technique is followed by the description of the equipment, its components, and how is placed inside the laboratory. The layout of the cylinder in the gas cabinets, the exhaust treatment of the toxic gases, and the emergency procedures are described. The manipulation and the use of the toxic gases are listed, as well as the safety procedures to help in the case of exposure. The safety data sheets of the toxic gases and all the used reagents are included: they should be consulted before using dangerous substances.
Subject MOVPE


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