Istituto dei materiali per l'elettronica ed il magnetismo     
Rampino S., Gauzzi A., Baldini M., Bindi M., Bissoli F., Ginocchio S., Rocca M., Zannella S. In situ oxidation of superconducting YBCO films by a supersonic O2 beam. In: IEEE Transactions on Applied Superconductivity, vol. 17 (2) pp. 3286 - 3289. Applied Superconductivity Conference 2006 Location: Seattle, WA Date: AUG 27-SEP 01, 2006. IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 2007.
We report on the successful implementation of a supersonic molecular oxygen O2 beam for the in situ oxidation of superconducting YBCO films. The beam is produced by a specially designed array of conical nozzles that were laser machined in a platinum foil. The array was mounted in proximity of the deposition area of a thermal co-evaporation system for YBCO film deposition. After a brief description of the basic concepts under- lying the physics of supersonic beams, we describe the design of the nozzle implemented in our system. Then, we illustrate and discuss the preliminary results obtained by varying a number of key parameters of the supersonic beam. Most important parameters turn out to be the input O2 pressure and the nozzle-film distance. We show that excellent electrical properties with zero-resistance superconducting critical temperatures,  Tc, in excess of 90 K are reproducibly obtained over the entire 20 cm X 20 cm deposition area. These results were obtained using various types of substrates relevant to coated conductor fabrication, including Zr-doped CeO2 buffered cube-textured Ni-W and MgO buffered hastelloy substrates.
URL: http://ieeexplore.ieee.org/stamp/redirect.jsp?arnumber=/77/4278028/04278252.pdf?arnumber=4278252&tag=1
DOI: 10.1109/TASC.2007.898932
Subject Coated conductors
film oxidation
supercon- ducting films
supersonic beams

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