PUMA
Istituto dei materiali per l'elettronica ed il magnetismo     
Seuret D., Diodati A., Leccabue F., Watts B. E., Melioli E., Panizzieri R., Meletti G., Bocelli G., Rodriguez H. Ferroelectric Thin Films Prepared by Pulsed Laser Ablation Deposition. Rapporto interno n. 79. Technical report, 1995.
 
 
Abstract
(English)
Ceramic lead zirconate titanate (PZT) thin films are under investigation for a variety of application in electronics. This miaterial has been prepared either by physical deposition methods such as sputtering and pulsed laser ablation or chemical-based methods such as metallorganic chemical vapour deposition (MOCVD) and solution deposition. In particular, amongst the wet chemical method sol-gel processing has some advantages: excellent compositional control and, when used together with spin coating, it is compatible with the existing semiconductor fabrication processes....
Subject Ceramic lead PZT


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