PUMA
Istituto dei materiali per l'elettronica ed il magnetismo     
Franchi S., Melioli E. Controllo Mediante Personal Computer di una Apparecchiatura per Epitassia da Fasci Molecolari. Rapporto interno n. 38. Technical report, 1984.
 
 
Abstract
(English)
Molecular Beam Epitaxy (MBE) is a technology suitable for the preparation of advanced epitaxial structures and superlattices. This capability stems from intrinsic features of the MBE growth process, but it also depends on the relatively high number of growth and design parameters which are available to determine the physical properties of the epitaxial structures. In order to obtain high quality structures for microelectronics the growth parameters should be reproducibly controlled to a very precise extent. This can be achieved by controlling MBE machines by means of computers.....
Subject MBE


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