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Istituto per la Microelettronica e Microsistemi     
Parisini A., Giubertoni D., Bersani M., Ferri M., Morandi V., Merli P. G. Dopant profiling on ultra shallow junctions in Si with ADF-STEM. In: 8th Multinational Congress on Microscopy (Prague, 17-21 June 2007). Proceedings, vol. Proceedings of the 8th Multinational Congress on Microscopy pp. 43 - 44. The Czechoslovak Microscopy Society - České Budějovice, 2007.

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